1. Substrate materials such as Si, Ge, SOI, GOI, SiC and compound semiconductors.
2. High -k, Low-k, GeSi,, GeSn, PCRAM, RRAM, STT-MRAM, and other materials used in Integrated circuits and optoelectronic devices.
3. Photoresist, DSA, CVD and ALD precursor, CMP materials, process chemicals and targets for of integrated circuit fabrication material.
4. New display material.
5. Advanced packaging material.
6. Novel two dimensional material.
7. Carbon nanotubes, graphene and other carbon based functional materials.
8. Materials testing technology and method.
9. Materials design theory and simulation.
Zhao Chao SAMT
Yang Deren Zhejiang University
Song Sannian Shanghai Institute of Microsystem and Information Technology
13818144065
songsannian@mail.sim.ac.cn
