The role of glass forming ability on switch endurance in Sb-Se chalcogenide amorphous

Revealing the Microscopic Fatigue Mechanism of As2Se3 Ovonic Threshold Switching Selector

Study on the phase transition behavior of Ge2Sb2Te5 alloy by indium doping

Dielectric and Elastic Properties of t-HfO2 Thin Films from First Principles

CMP characteristics of High-K material HfOx thin film with a variety of process parameters

A comparative study of surface treatment methods for SiN/SiO stacked layers after etching in 3D DRAM

WET Lateral etching of Si3N4 in 3D DRAM Structures

High selectivity wet etching in 3D DRAM fabrication

Experimental Study on the Mechanism of Oxide Regeneration in SiN-SiO Stacked Structure

Oxide lateral gas etching uniformity improve in 3D DRAM structure

Radical etching characteristic of titanium nitride using NF3 and hydrogen mixtures on 3D multilayer stack transistor integration

The feasibility of the radical etching on TiN layers in 3D multilayer stack structure

有机物电解氟化机理研究

三氟化氮的电解合成、应用领域及其发展前景

气相色谱法测定高纯三氟化硼中的微量杂质

膜分离、变压吸附及深冷制氮工艺研究

Identification of different phase structures of hafnium oxide by atomic image simulations

基于粉末原子层沉积法制备的电泳粒子及其应用性能研究